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Dengfeng Xu

Research Assistant

Room 407, WeiqingBuilding, Tsinghua University,Beijing 100084, China

Tel.: +86-10-62781457

Fax: +86-10-62781457

E-mail: xudf@mails.tsinghua.edu.cn


Education background

Ph.D., Department of Precision Instruments and Mechanology, Tsinghua University, China, 2007

M.S., School of Mechanical and Electrical Engineering, Harbin Institute of Technology, China, 1998

B.S., School of Automotive Engineering,Harbin Institute of Technology,  China, 1996


Experience

2013.1-Present, Department of Mechanical Engineering, Tsinghua University, China, Research Assistant

2010.9-2012.12, Department of Precision Instruments and Mechanology, Tsinghua University, China, Research Assistant


Areas of Research Interests/ Research Projects

Research on Key Design Technologies of 45-22nm High Performance E-CHUCK in PVD, supported by National semiconductor equipment and manufacturing process major projects, China (2012-2014)

Academic Achievement

Yu. Zhu, Qiang. Li, Dengfeng. Xu, and Ming. Zhang. Modeling of axial magnetic force and stiffness of ring-shaped permanent magnets passive vibration isolator and its vibration isolating experiment. IEEE Transaction on Magnetics

Xudengfeng, Zhu yu. Dynamic analysis of a gas bearing support guide way through simplified beam model. International Technology and Innovation Conference 2006, ITIC 2006,Hangzhou, China,6-7 Nov. 2006 Page(s):1184 – 1187。

Xudengfeng, zhuyu. Principle and application of horizontal suspension isolator constituted by trilinear pendulum. Journal of Beijing University of Aeronautics and Astronautics,Vo.l 36 No1 8, August 2010, page 1005-1008

Xudengfeng, zhuyu. Improving Damping Capacity of the Aerostatic Bearing. Nanotechnology and Precision Engineering,Vo.l 8 No. 1, Jan. 2010,page 85-89

Xudengfeng, zhuyu. Performance analysis of dual-chamber pneumatic vibration isolator. Journal of Vibration and Shock, Vo.l 28 No. 9 2009, page 168-169


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010-62772677

mayue@tsinghua.edu.cn

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