2020/12-至今, 清华大学机械工程系,副研究员
2014/01-2020/12, 清华大学机械工程系,助理研究员
2012/01-2013/12, 清华大学精密仪器系,博士后
1. Xie LL, Cheng J, Wang TQ, Lu XC. Mechanical wear behavior between CeO2(100), CeO2(110), CeO2(111), and silicon studied through atomic force microscopy. Tribology International, 2020, 106616.
2. Zhang LF, Wang TQ, Lu XC. Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper interconnects with cobalt barrier layers. Journal of Materials Science, 2020, 55(21), 8992-9002.
3. Cheng J, Pan JS, Wang TQ,Lu XC. Micro-galvanic corrosion of Cu-Ru couple in Potassium Periodate (KIO4) solution. Corrosion science, 2018, 137:184-193.
4. Rao C, Wang TQ, Peng YR, Cheng J, Sung Kyu Lim, Lu XC. Residual stress and pop-out simulation for TSVs and contacts in via-middle process. IEEE Transactions on Semiconductor Manufacturing, 2017, 37(3):333-339.
5. Wang J, Wang TQ, Pan GS, Lu XC. Effect of photocatalytic oxidation technology on GaN CMP. Applied Surface Science, 2016, 361, 18-24.